The textbook "Advanced Mechatronics and MEMS Devices" offers a comprehensive introduction to the latest technologies in the field of microelectronics and mechanical microsystems. It addresses the advanced development of MEMS (Micro-Electro-Mechanical Systems) and highlights the challenges and progress in micro-manufacturing, including microfabrication, micromounting, and the use of nanomaterials. Readers gain insights into various MEMS sensors, including arrays and multidimensional accelerometers, as well as innovative applications such as artificial skin with integrated tactile components. Additionally, advanced robotics topics are covered, including the application of MEMS in robotics, such as modular snake robots and flying robots with adjustable wings.