The book "Modelling of Microfabrication Systems" offers a comprehensive analysis of the modeling of systems relevant to the production of three-dimensional microstructures. It covers a variety of topics, including ion beam micromachining, X-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. The models presented simulate the behavior of these systems and are complemented by graphical representations that are discussed in conjunction with experimental results. Understanding these models is crucial for the operation and optimization of microfabrication systems. Notably, the book emphasizes high aspect ratio microtechnologies, making it a valuable resource for scientists, engineers, doctoral students, and manufacturers engaged in research and development aimed at improving the accuracy and precision of microfabrication systems for commercial applications.