After introducing the basic mechanical and fluidic elements, the sensory, generative, actuating, and multi-stage sensory converters are described first. This is followed by chapters on materials in microsystem technology and manufacturing processes for microcomponents, before explaining the assembly of microcomponents and providing insights into the measurement and testing technology of microsystems. Finally, the design and development of components, the implementation of operating principles, and the effective use of materials are discussed. Each chapter and larger section includes summaries, an overview of important key terms, and references to further literature. This ensures the efficient use of the book as a teaching and reference work.