In many application areas, microstructures are gaining importance. In biomedical engineering, microstructures facilitate directed cell growth of nerve, muscle, or skin cells. In lighting and display technology, microstructured light-guiding films are combined with LEDs. These structures serve for light extraction and vary in length and spacing to achieve homogeneous illumination. Due to the requirements for geometry and surface quality, such structures cannot be effectively produced using traditional microstructuring methods, such as lithography. Ultraprecise machining with monocrystalline diamond tools using Fast-Tool-Servo systems (FTS) fundamentally represents an alternative manufacturing method for microstructures. However, it is necessary to adapt diamond machining for the production of these structures.