Mechanical Microsensors
English, M. Elwenspoek, R. Wiegerink, 2010More than 10 pieces in stock at supplier
Product details
The book "Mechanical Microsensors" provides a comprehensive introduction to the world of mechanical microsensors realized through silicon micromachining. It is based on a course organized by the Swiss Foundation for Research in Microtechnology, developed and taught by the authors. The work has two main objectives: firstly, it offers an overview of various types of mechanical microsensors, including pressure, force, acceleration, angular velocity, and fluid flow sensors. Secondly, it serves as a textbook for engineers who wish to address the fundamental design issues of these sensors. The book is aimed at engineers in the fields of mechanical and electrical engineering and imparts the necessary knowledge to tackle challenges in sensor design. It is designed to be accessible to students in their third or fourth year of study and can be used as teaching material in relevant courses.
topic | Technology & IT |
Language | English |
Author | M. Elwenspoek, R. Wiegerink |
Year | 2010 |
Number of pages | 295 |
Book cover | Paperback |
Item number | 55375696 |
Publisher | Springer |
Category | Reference books |
Release date | 4.3.2025 |
topic | Technology & IT |
Language | English |
Author | M. Elwenspoek, R. Wiegerink |
Year | 2010 |
Number of pages | 295 |
Book cover | Paperback |
CO₂ emissions | 0,5 kg |
Climate contribution | EUR 0,12 |
Product Safety |
30-day right of return if unopened
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