Computer-aided design (CAD) of semiconductor microtransducers is relatively new compared to their counterparts in the integrated circuit world. Integrated silicon microtransducers are realized using microfabrication techniques similar to those for standard integrated circuits (ICs). Unlike IC devices, however, microtransducers must interact with their environment, making their numerical simulation considerably more complex. While the design of ICs aims at suppressing parasitic effects, microtransducers thrive on optimizing certain effects. The challenging quest for physical models and simulation tools enabling microtransducer CAD is the topic of this book. The book is intended as a text for graduate students in electrical engineering and physics and as a reference for CAD engineers in the microsystems industry.