The book "Precision Temperature Sensors in CMOS Technology" provides a comprehensive analysis of CMOS-based temperature sensors, which offer advantages over traditional temperature sensors due to their cost-effectiveness and direct digital output. Despite these advantages, there are challenges, particularly regarding the absolute accuracy of these sensors. This technical book presents innovative techniques aimed at improving the accuracy of CMOS temperature sensors. The effectiveness of these techniques is demonstrated through three prototypes, with the final prototype achieving a significant accuracy of ±0.1 °C over the military temperature range. The book also offers an overview of existing knowledge and techniques developed in academic and industrial research for smart temperature sensors. It addresses the fundamental operating principles of these sensors and the challenges that must be overcome to enhance accuracy while maintaining cost advantages.