The book "Excimer Laser Technology" offers a comprehensive examination of excimer laser technology, which is widely used in various applications and devices. It discusses current developments in this field as well as future technologies, including F2 laser technology. Authors Dirk Basting and Gerd Marowsky have created a compact handbook that not only covers the fundamentals of optics and devices but also provides detailed descriptions of the various laser systems. This specialized book is aimed at students of laser technology, researchers in process applications, engineers, and anyone interested in excimer laser technology. It provides an effective and understandable introduction to the current and future state of excimer laser technology.